Single crystal pulling apparatus
US5361721A · kind A · utility
17Cited by
7References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 2, 1993 |
| Grant date | Nov 8, 1994 |
| Priority date | — |
| Expiry date | Feb 2, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1068
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A single crystal pulling apparatus of Czochralski technique type including (i) a cylindrical partition adapted to divide the surface portion of the melt into an inner part and an outer part, the former being where the single crystal is grown and the latter being where granular polycrystal material is supplied, (ii) a flat ring having heat reflecting and insulating property held horizontally above the melt, and (iii) a vertically shiftable purge tube suspended centrally into the heating chamber adapted to enter into the inner hole of the flat ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.