Method for resistance measurements on a semiconductor element with controlled probe pressure
US5369372A · kind A · utility
2Cited by
8References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 1992 |
| Grant date | Nov 29, 1994 |
| Priority date | — |
| Expiry date | Mar 9, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/854
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring the resistance or conductivity between two or more conductors which are placed against a semiconductor element, wherein in order to bring the contact resistance between the conductors and the element to, to hold it at,a predetermined value during measuring, the conductors are held at a constant distance and/or under constant pressure relative to the semiconductor element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.