Marc Meuris
25Patents
9h-index
22Co-inventors
75Inventor score
Filing activity: Mar 9, 1992 → Jul 1, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6398975B1 | Method and apparatus for localized liquid treatment of the surface of a substrate | Emerging Cross-Sectional Technologies | 91 | Expired |
| US6576151B1 | Etching of silicon nitride by anhydrous halogen gas | Electricity | 39 | Expired |
| US6334902B1 | Method and apparatus for removing a liquid from a surface | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6851435B2 | Method and apparatus for localized liquid treatment of the surface of a substrate | Emerging Cross-Sectional Technologies | 33 | Expired |
| US6551409B1 | Method for removing organic contaminants from a semiconductor surface | Electricity | 31 | Expired |
| US6322598A | Semiconductor processing system for processing discrete pieces of substrate to form electronic devices | Electricity | 20 | Expired |
| US5585734A | Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6472294B2 | Semiconductor processing method for processing discrete pieces of substrate to form electronic devices | Electricity | 15 | Expired |
| US8119488B2 | Scalable quantum well device and method for manufacturing the same | Electricity | 9 | Active |
| US6530385B2 | Apparatus and method for wet cleaning or etching a flat substrate | Emerging Cross-Sectional Technologies | 9 | Expired |
| US8524562B2 | Method for reducing Fermi-Level-Pinning in a non-silicon channel MOS device | Electricity | 8 | Active |
| US6632751B2 | Method and apparatus for liquid-treating and drying a substrate | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6821349B2 | Method and apparatus for removing a liquid from a surface | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6247481A | Apparatus and method for wet cleaning or etching a flat substrate | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7915608B2 | Scalable quantum well device and method for manufacturing the same | Electricity | 4 | Active |
| US6799588B1 | Apparatus for treating substrates | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6910487B2 | Method and apparatus for liquid-treating and drying a substrate | Emerging Cross-Sectional Technologies | 3 | Expired |
| US5954068A | Device and method for treating substrates in a fluid container | Electricity | 3 | Expired |
| US5369372A | Method for resistance measurements on a semiconductor element with controlled probe pressure | Emerging Cross-Sectional Technologies | 2 | Expired |
| US9231148B2 | Method for cleaning and passivating chalcogenide layers | Emerging Cross-Sectional Technologies | 1 | Active |
| US8288291B2 | Method for removal of bulk metal contamination from III-V semiconductor substrates | Electricity | 1 | Active |
| US9647153B2 | Method for forming thin film chalcogenide layers | Emerging Cross-Sectional Technologies | 0 | Active |
| US8354344B2 | Methods for forming metal-germanide layers and devices obtained thereby | Electricity | 0 | Active |
| US10978601B2 | Partially translucent photovoltaic modules and methods for manufacturing | Emerging Cross-Sectional Technologies | 0 | Active |
| US12419132B2 | Method for interconnecting photovoltaic cells and photovoltaic cell assembly | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.