Vacuum chuck
US5374829A · kind A · utility
84Cited by
3References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 1994 |
| Grant date | Dec 20, 1994 |
| Priority date | — |
| Expiry date | Apr 25, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/11
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A wafer holding device of the vacuum attraction type includes a structural member having a protrusion for supporting a wafer and elastic members made of a material having an elasticity modulus smaller than that of the wafer and that of the structural member. The elastic members are distributed on a wafer attraction plane of the structural member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.