Direct load/unload semiconductor wafer cassette apparatus and transfer system
US5387067A · kind A · utility
42Cited by
10References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 14, 1993 |
| Grant date | Feb 7, 1995 |
| Priority date | — |
| Expiry date | Jan 14, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor cassetteand transfer system for facilitating the direct loading and unloading of wafers from different sides of a cassette by a first robot handling means moveable along a first extension axis and second robot handling means moveable along a second extension axis intersecting said first extension axis at an acute angle, and at a predetermined point concurrent with the center of the cassetteas it is disposed in a fixed position within a loadlock chamber of a wafer processing apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.