Probe apparatus with a swinging holder for an object of examination
US5404111A · kind A · utility
117Cited by
9References
11Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 17, 1993 |
| Grant date | Apr 4, 1995 |
| Priority date | — |
| Expiry date | Jun 17, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2656
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe apparatus which has a probe card having a plurality of probes, a wafer holder located above or beside the probe card, for holding a wafer to be examined, a tester head electrically connected to the probes of the probe card, a tester electrically connected to the tester head, for detecting electrical characteristics of the wafer from the data output from the wafer, and a CCD camera arranged to oppose the object, for detecting the position of the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.