Tapping atomic force microscope
US5412980A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 7, 1992 |
| Grant date | May 9, 1995 |
| Priority date | — |
| Expiry date | Aug 7, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/881
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An atomic force microscope in which a probe tip is oscillated at a resonant frequency and at amplitude setpoint and scanned across the surface of a sample in contact with the sample, so that the amplitude of oscillation of the probe is changed in relation to the topography of the surface of the sample. The setpoint amplitude of oscillation of the probe is greater than 10 nm to assure that the energy in the lever arm is much higher than that lost in each cycle by striking the sample surface, thereby to avoid sticking of the probe tip to the sample surface. Data is obtained based either on a control signal produced to maintain the established setpoint or directly as a function of changes in the amplitude of oscillation of the probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.