Scanning probe microscope using stored data for vertical probe positioning
US5418363A · kind A · utility
89Cited by
4References
37Claims
0Family size
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Key dates
| Filing date | Feb 25, 1994 |
| Grant date | May 23, 1995 |
| Priority date | — |
| Expiry date | Feb 25, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for scanning a probe over a surface to either produce a measurement of the surface representative of a parameter other than the topography of the surface or to perform a task on the surface. The scanning operation is divided into two parts and with a first scan to obtain and store topographical information and with a second scan to measure the parameter of the surface other than topography or to perform the task while the probe height is controlled using the stored topographic information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.