Filter device
US5434644A · kind A · utility
27Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 1994 |
| Grant date | Jul 18, 1995 |
| Priority date | — |
| Expiry date | May 18, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/26
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A filter device for a resist-treatment system, comprising a frame having an aperture through which the outside air is introduced into the resist-treatment system, a fan unit for sucking the outside air into the aperture, and a filter element supported by means of the frame so as to be situated at least on one side the fan unit, the filter element including a porous body containing an acid component capable of adsorbing an alkali component by reaction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.