Junichi Kitano
50Patents
12h-index
58Co-inventors
87Inventor score
Filing activity: May 18, 1994 → Jun 12, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6620251B2 | Substrate processing method and substrate processing apparatus | Emerging Cross-Sectional Technologies | 468 | Expired |
| US5876280A | Substrate treating system and substrate treating method | Emerging Cross-Sectional Technologies | 53 | Expired |
| US6063439A | Processing apparatus and method using solution | Emerging Cross-Sectional Technologies | 35 | Expired |
| US5928390A | Vertical processing apparatus | Electricity | 33 | Expired |
| US5434644A | Filter device | Physics | 27 | Expired |
| US5944894A | Substrate treatment system | Electricity | 26 | Expired |
| US6333003A | Treatment apparatus, treatment method, and impurity removing apparatus | Electricity | 20 | Expired |
| US6585430B2 | System and method for coating and developing | Physics | 19 | Expired |
| US6617095B2 | Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist pattern | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6633022B2 | Substrate processing apparatus and substrate processing method | Electricity | 16 | Expired |
| US6518199B2 | Method and system for coating and developing | Physics | 14 | Expired |
| US6485203B2 | Substrate processing method and substrate processing apparatus | Performing Operations; Transporting | 13 | Expired |
| US6955485B2 | Developing method and developing unit | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6875466B2 | Substrate processing method and substrate processing apparatus | Electricity | 10 | Expired |
| USD732326S1 | Beer dispenser | General | 10 | Active |
| US6467976B2 | Coating and developing system | Electricity | 9 | Expired |
| US8366872B2 | Substrate treatment method, coating film removing apparatus, and substrate treatment system | Electricity | 8 | Active |
| US6518718B2 | Speed electromotive force phase control system adapted to low speed | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7926441B2 | Substrate treatment method, coating treatment apparatus, and substrate treatment system | Emerging Cross-Sectional Technologies | 7 | Active |
| US6875281B2 | Method and system for coating and developing | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6632281B2 | Substrate processing apparatus and substrate processing method | Electricity | 6 | Expired |
| US7401988B2 | Substrate processing apparatus and substrate processing method | Electricity | 5 | Active |
| US7959988B2 | Coating film forming apparatus and method | Electricity | 4 | Active |
| US7208066B2 | Substrate processing apparatus and substrate processing method | Electricity | 4 | Expired |
| US6884298B2 | Method and system for coating and developing | Physics | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.