Modular particle monitor for vacuum process equipment
US5436465A · kind A · utility
18Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 13, 1993 |
| Grant date | Jul 25, 1995 |
| Priority date | — |
| Expiry date | May 13, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/53
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and a method provide a modular design for a particle monitor of external design used in a vacuum process equipment. In one embodiment, the key elements, i.e. laser assembly, the detection module, the beam stop and a darkened surface opposite the detection module, can be independently mounted on a pump line. The particle monitors of the present invention can be mounted on both straight sections and bends of the pump line. Each key element can be accessed independently of other key elements for repair and service.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.