Stage device
US5446519A · kind A · utility
56Cited by
1References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 26, 1994 |
| Grant date | Aug 29, 1995 |
| Priority date | — |
| Expiry date | Jan 26, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stage device is provided with a base plate supported by an antivibration device; a table supported by the base plate through a driving shaft in substantially rigid manner; and a first drive system for placing the table in a predetermined position on the base plate. A second drive systems is provided for applying, to the table, an acceleration the same as that of the base plate, in order to correct the relative positional aberration between the base plate and the table, induced by the vibration of the base plate generated when the table is driven by the first drive system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.