Susumu Makinouchi
37Patents
16h-index
21Co-inventors
81Inventor score
Filing activity: May 24, 1988 → Nov 29, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4860374A | Apparatus for detecting position of reference pattern | Physics | 89 | Expired |
| US5446519A | Stage device | Physics | 56 | Expired |
| US5699145A | Scanning type exposure apparatus | Physics | 49 | Expired |
| US4801977A | Projection optical apparatus | Physics | 46 | Expired |
| US5969800A | Scanning exposure apparatus and method | Physics | 44 | Expired |
| US6260282A | Stage control with reduced synchronization error and settling time | Physics | 33 | Expired |
| US5343270A | Projection exposure apparatus | Physics | 31 | Expired |
| US5907392A | Exposure apparatus | Physics | 27 | Expired |
| US5978071A | Projection exposure apparatus and method in which mask stage is moved to provide alignment with a moving wafer stage | Physics | 27 | Expired |
| US5742376A | Projection exposure apparatus and projection exposure method | Physics | 26 | Expired |
| US5677754A | Scanning exposure apparatus | Physics | 26 | Expired |
| US5483311A | Projection exposure apparatus | Physics | 25 | Expired |
| US5877845A | Scanning exposure apparatus and method | Physics | 25 | Expired |
| US6259511A | Scanning type exposure apparatus | Physics | 20 | Expired |
| US4958082A | Position measuring apparatus | Physics | 19 | Expired |
| US6490025B1 | Exposure apparatus | Physics | 18 | Expired |
| US6188464A | Exposure apparatus | Physics | 16 | Expired |
| US8760622B2 | Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method | Physics | 11 | Active |
| US8208128B2 | Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method | Physics | 10 | Active |
| US5777721A | Exposure method and apparatus with control of a linear motor | Emerging Cross-Sectional Technologies | 5 | Expired |
| US5714860A | Stage device capable of applying a damping force to a movable member | Physics | 3 | Expired |
| US6646715B1 | Scanning exposure apparatus and method with run-up distance control | Physics | 3 | Expired |
| US6633363B1 | Scanning exposure apparatus and method | Physics | 3 | Expired |
| US8064037B2 | Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure | Physics | 2 | Active |
| US7723671B2 | Positional information detecting device | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.