Apparatus for supplying granular raw material for a semiconductor single crystal pulling apparatus
US5462010A · kind A · utility
15Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 1992 |
| Grant date | Oct 31, 1995 |
| Priority date | — |
| Expiry date | Oct 14, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1056
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for continuously supplying granular polycrystal silicon to a crucible of a semiconductor single crystal pulling apparatus, comprising a funnel-shaped tank having a relatively large capacity, a main hopper having a relatively small capacity and weight, a subhopper having an intermediate capacity and weight and providing a passage from said tank to said main hopper, and a weight sensor for detecting the weight of the main hopper, wherein the overall weight of the main hopper is measured to obtain the flow rate (supply rate) of the granular polycrystal silicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.