Electron detector with high backscattered electron acceptance for particle beam apparatus
US5466940A · kind A · utility
31Cited by
2References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 20, 1994 |
| Grant date | Nov 14, 1995 |
| Priority date | — |
| Expiry date | Jun 20, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2448
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron detector for use in particle beam apparatus, providing particularly high acceptance of backscattered electrons. The electron detector includes an electron multiplier for detecting electrons and an electrode deployed between the electron multiplier and a specimen. The electrode is biased at a negative potential with respect to the specimen and also with respect to the electron multiplier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.