Charged beam irradiating apparatus having a cleaning means and a method of cleaning a charged beam irradiating apparatus
US5466942A · kind A · utility
39Cited by
4References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 10, 1993 |
| Grant date | Nov 14, 1995 |
| Priority date | — |
| Expiry date | Dec 10, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged beam irradiating apparatus, comprises a charged beam generating means, a vacuum chamber having a part exposed by the charged beam, the part exposed having contaminations deposited thereon, a gas introducing system connected to the chamber which includes a means for producing electrically neutral active species for removing the contaminations and selectively carrying the species into the chamber, and a system for exhausting the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.