Patent · US Expired

Mass flow sensor having a measuring element arranged on a membrane retained on a monocrystalline silicon wafer

US5467649A · kind A · utility

4Cited by

6References

3Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Eckart Reihlen · Reutlingen, DE
Jiri Marek · Reutlingen, DE
Frank Bantien · Ditzingen, DE
Guenther Findler · Stuttgart, DE
Michael Offenberg · Lörrach, DE
Josef Kleinhans · Ludwigsburg, DE
Uwe Konzelmann · Asperg, DE
Botho Ziegenbein · Reutlingen, DE

Key dates

Filing date	Jul 21, 1994
Grant date	Nov 21, 1995
Priority date	—
Expiry date	Jul 21, 2014

Classification

Technology area (CPC G)Physics
CPC primaryG01F1/86
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A mass flow sensor includes a measuring element arranged on a membrane that is clamped in a frame. The sensor is formed by introducing a recess into a silicon wafer. Through the application of a recess having perpendicular walls, the thickness of the frame can be reduced, thus allowing the required surface area of the wafer to also be reduced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.