Method of unsticking components of micro-mechanical devices
US5482564A · kind A · utility
117Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 1994 |
| Grant date | Jan 9, 1996 |
| Priority date | — |
| Expiry date | Jun 21, 2014 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/117
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of unsticking contacting elements (11, 17) of a micro-mechanical device (30). The device is exposed to either a low surface tension liquid with a surfactant (32) or to a supercritical fluid (62) so as to avoid damage to fragile components of the device (30). The exposure conditions are controlled so as to provide optimum results without damage to the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.