Quick release process kit
US5484486A · kind A · utility
14Cited by
1References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 1994 |
| Grant date | Jan 16, 1996 |
| Priority date | — |
| Expiry date | May 2, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S156/915
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention is directed to a novel assembly of replaceable parts for use in a substrate processing apparatus. Covers for the substrate processing surface are attached in a plurality of pieces as opposed to a solid piece, for removeability without removing the wafer support pedestals. A ring for surrounding the pedestal includes a fastener enabling the ring to snap in place onto the pedestal. A focus ring for surrounding the pedestal ring attaches to the pedestal ring via a snug fit into a built-in grooved series of notches in the pedestal ring. A novel fastener that enables two articles to snap together is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.