Yan Rozenzon
20Patents
5h-index
39Co-inventors
69Inventor score
Filing activity: May 2, 1994 → Feb 1, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6916399B1 | Temperature controlled window with a fluid supply system | Electricity | 138 | Expired |
| US5484486A | Quick release process kit | Emerging Cross-Sectional Technologies | 14 | Expired |
| US5693179A | Contaminant reduction improvements for plasma etch chambers | Emerging Cross-Sectional Technologies | 14 | Expired |
| US10163606B2 | Plasma reactor with highly symmetrical four-fold gas injection | Electricity | 10 | Active |
| US8562745B2 | Stable wafer-carrier system | Chemistry; Metallurgy | 6 | Active |
| US10008368B2 | Multi-zone gas injection assembly with azimuthal and radial distribution control | Electricity | 5 | Active |
| US5714036A | Chlorine reduction module | Emerging Cross-Sectional Technologies | 5 | Expired |
| US5716484A | Contaminant reduction improvements for plasma etch chambers | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8652259B2 | Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition | Chemistry; Metallurgy | 4 | Active |
| US9441295B2 | Multi-channel gas-delivery system | Emerging Cross-Sectional Technologies | 2 | Active |
| US11728141B2 | Gas hub for plasma reactor | Electricity | 1 | Active |
| US11244811B2 | Plasma reactor with highly symmetrical four-fold gas injection | Electricity | 1 | Active |
| US10861681B2 | Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent | Emerging Cross-Sectional Technologies | 1 | Active |
| US11139150B2 | Nozzle for multi-zone gas injection assembly | Electricity | 1 | Active |
| US8968473B2 | Stackable multi-port gas nozzles | Chemistry; Metallurgy | 0 | Active |
| US9240513B2 | Dynamic support system for quartz process chamber | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US8845809B2 | Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition | Chemistry; Metallurgy | 0 | Active |
| US11251067B2 | Pedestal lift for semiconductor processing chambers | Electricity | 0 | Active |
| US11114285B2 | Apparatus for exhaust cooling | Emerging Cross-Sectional Technologies | 0 | Active |
| US10410841B2 | Side gas injection kit for multi-zone gas injection assembly | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.