Method of electrically measuring a thin oxide thickness by tunnel voltage
US5485097A · kind A · utility
20Cited by
5References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 8, 1994 |
| Grant date | Jan 16, 1996 |
| Priority date | — |
| Expiry date | Aug 8, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of electrically measuring thin oxide thickness by tunnel voltage in a device under test includes the steps of applying a predetermined value of current density through the device under test, measuring voltage developed across the device under test, and calculating the oxide electrical thickness through a predetermined calibration curve. This method is suitable for incorporation into an automatic tester for fast and high volume data collection. This technique also has higher resolution and accuracy than measurements obtained optically.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.