Reversing orientation of sputtering screen to avoid contamination
US5516403A · kind A · utility
4Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 16, 1994 |
| Grant date | May 14, 1996 |
| Priority date | — |
| Expiry date | Dec 16, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/34
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sputtering apparatus deposits a layer of material on a substrate. The apparatus includes a screening member, such as a plate collimator or a tube collimator, located between the target and substrate. A motor drive reverses the respective positions of the two opposite sides of the screening device which respectively face the substrate and the target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.