Apparatus for improved image resolution in electron microscopy
US5517033A · kind A · utility
20Cited by
6References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 1994 |
| Grant date | May 14, 1996 |
| Priority date | — |
| Expiry date | Jul 25, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/224
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for improving the resolution of images produced by an electron microscope is provided and includes an electron beam forming an electron image, a support structure mounted in the path of the electron beam, with the support structure transmitting the electron image. Scintillating material is coated onto the side of the support structure opposite that on which the electron image is incident, the scintillating material converting the electron image into a light image. A mirror is provided for deflecting the optical path of the light image into a CCD camera positioned to receive and record the light image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.