Method for making dynamic random access memory cell capacitor
US5523542A · kind A · utility
28Cited by
2References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 15, 1995 |
| Grant date | Jun 4, 1996 |
| Priority date | — |
| Expiry date | May 15, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/435
Abstract
A random access memory (RAM) cell capacitor and its method of fabrication. A bottom electrode plate of the capacitor is provided with a plurality of islands disposed on the surface thereof so as to attain an increase in the capacitance thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.