Sample stage for scanning probe microscope head
US5530253A · kind A · utility
5Cited by
7References
15Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Oct 6, 1994 |
| Grant date | Jun 25, 1996 |
| Priority date | — |
| Expiry date | Oct 6, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/86
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sample stage of a scanning probe microscope head is capable of changing the direction of a sample plane stably over a wide range in a simple operation. Fixtures fix both ends of an outer flexible tube of a flexible shaft. A displacement lead-in portion displaces one end of an inner flexible tube of the flexible shaft relative to the outer flexible tube, and a displacement lead-out portion and a coupling portion transmit the displacement led in the inner flexible tube of the flexible shaft to a sample carrier portion to turn the sample carrier portion about a turn axis, thereby getting a sample plane to change direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.