Particle monitor for throttled pumping systems
US5534706A · kind A · utility
6Cited by
9References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 7, 1994 |
| Grant date | Jul 9, 1996 |
| Priority date | — |
| Expiry date | Mar 7, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N15/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for accomplishing particle monitoring above the throttle valve of a turbo pump provides a particle sensor which is built into the throttle valve in such a way that it is insensitive to local plasma glows. Furthermore, the particle sensor is placed such that a particle monitoring laser beam of the particle sensor is offset from the centerline of the pipe, so as to maximize exposure to process gas flow which is diverted to the periphery of the pipe by the position of a butterfly valve plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.