Energy filtering for electron back-scattered diffraction patterns
US5536940A · kind A · utility
1Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1995 |
| Grant date | Jul 16, 1996 |
| Priority date | — |
| Expiry date | Feb 27, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sample to be analyzed by a scanning electron microscope is held at an electrostatic potential higher than the recording plate of the microscope. This provides that electrons scattered from the sample which are at an energy level lower than a chosen level are drawn back into the sample by the potential of the sample, while other, higher energy scattered electrons reach the recording plate to form a pattern thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.