Piezoresistive accelerometer with enhanced performance
US5539236A · kind A · utility
21Cited by
4References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 1994 |
| Grant date | Jul 23, 1996 |
| Priority date | — |
| Expiry date | Sep 9, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S73/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electromechanical transducer is provided, and the process for making it utilizes a piezoresistive element or gage which is dielectrically isolated from a gap spanning member and substrate upon which it is supported. The gage of the invention is a force gage and is derived from a sacrificial wafer by a series of etching and bonding steps which ultimately provide a gage with substantially reduced strain energy requirements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.