Efficient image registration
US5548326A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 31, 1994 |
| Grant date | Aug 20, 1996 |
| Priority date | — |
| Expiry date | Aug 31, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30152
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method and apparatus for efficient registration of a pair of digitized images is provided that obtains a registration metric value based upon a Sum of Absolute Differences registration metric computation for each of a plurality of neighboring-pixel relative displacements, and, for example, iteratively selects a new initial relative displacement from among the plurality of neighboring-pixel relative displacements such that each succeeding new initial relative displacement is associated with a smaller registration metric value, until an initial relative displacement that is associated with a minimum registration metric value is reached. In general, the relative displacement that is associated with the minimum registration metric value is located using a two-dimensional numerical optimization analysis. The invention is especially useful for flaw and defect analysis, such as Golden Template Analysis, third optical inspection, as well as for pair-wise comparison of die images on a semiconductor wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.