Patent · US Expired

Dual cathode sputter coating apparatus

US5558751A · kind A · utility

35Cited by

5References

3Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Peter Mahler · Obertshausen, DE
Wolfgang Stang · Kefenrod, DE
Michael Scherer · Crimmitschau, DE
Roland Gesche · Seligenstadt, DE

Key dates

Filing date	Feb 8, 1995
Grant date	Sep 24, 1996
Priority date	—
Expiry date	Feb 8, 2015

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/34
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

In a coating apparatus, a sputter cathode (1) has, directly side by side, two electrodes (2, 3) connected in common to a high-frequency generator and having each a target (9, 10). The targets (9, 10) of both electrodes (2, 3) abut one another each with a straight edge (11, 12). A dark space shield surrounds both electrodes (2, 3) and targets (9, 10) together.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.