Ceramic electrostatic chuck with built-in heater
US5566043A · kind A · utility
19Cited by
2References
10Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 27, 1994 |
| Grant date | Oct 15, 1996 |
| Priority date | — |
| Expiry date | Dec 27, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The ceramic electrostatic chuck with built-in heater of the present invention is disclosed having electrodes for electrostatic chuck made from an electroconductive ceramic bonded to a surface of a supporting substrate made from an electrically insulating ceramic, a heat generating layer made from an electroconductive ceramic is bonded to the other surface and the side surface and a covering layer made from an electrically insulating ceramic is provided thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.