Piezo-optical pressure sensitive switch and methods for fabricating the same
US5569626A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 1994 |
| Grant date | Oct 29, 1996 |
| Priority date | — |
| Expiry date | Apr 28, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
Abstract
Piezo-optical pressure sensitive devices employing porous semiconductor material as a stress sensitive member. The devices monitor pressure or force applied thereto by detecting a corresponding change in the amount of light absorbed by a porous layer of semiconductive material such as silicon. A pressure or stress signal is thus converted into an optical one. The sensing element of an optical switch embodiment of the device is comprised of a transparent layer of material upon which there is disposed a porous layer of semiconductive material. When unstressed, the porous layer absorbs monochromatic light of a predetermined wavelength. When the porous layer is stressed, a metallized epitaxial layer formed thereon reflects the light back through the transparent layer where it can be detected by a light detection system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.