Isolated sidewall capacitor with dual dielectric

US5585998A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• David E. Kotecki · Hopewell Junction, US
• William H. Ma · Wappingers Falls, US
• Katherine L. Saenger · Ossining, US

Key dates

• Filing date: Dec 22, 1995
• Grant date: Dec 17, 1996
• Expiry date: Dec 22, 2015

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/435

Abstract

An isolated sidewall capacitor with dual dielectric, which includes two capacitors. The first capacitor includes a first conductor on top of a substrate, a first non-conductor on top of and substantially in register with the first conductor, the first conductor and first non-conductor having a first opening formed therein, a non-conductive sidewall spacer formed in the first opening, the non-conductive sidewall spacer having a second opening formed therein, and a second conductor formed in the second opening. The second capacitor includes the second conductor, a first non-conductor disposed over the top portion of the second conductor, a third conductor disposed over the first non-conductor, and the third conductor electrically connected to the first conductor. A second non-conductor isolates the first conductor from the second conductor.