Illumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the same
US5594587A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 1995 |
| Grant date | Jan 14, 1997 |
| Priority date | — |
| Expiry date | Mar 10, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The illumination device of the present invention is directed to an illumination device comprising a light source system for generating illumination light, a collimate optical system for collimating the illumination light from the light source system into a substantially collimated light beam, an optical integrator for forming a plurality of light source images on the basis of the light beam from the collimate optical system, a variable aperture stop arranged at an exit surface of the optical integrator, and a condenser lens system for guiding the light beam from the optical integrator to a surface of an object to be illuminated, and making an incident surface of the optical integrator conjugate with the surface of the object to be illuminated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.