Device for indexing magazine compartments and wafer-shaped objects in the compartments

US5605428A · kind A · utility

Assignee

• JENOPTIK GmbH · DE

Inventors

• Andreas Birkner · Jena, DE
• Berndt Lahne · Jena, DE
• Klaus Schultz · Jena, DE

Key dates

• Filing date: Nov 3, 1994
• Grant date: Feb 25, 1997
• Expiry date: Nov 3, 2014

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/137
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A device for indexing magazine compartments of a magazine and wafer-shaped objects contained therein to ensure precise access of the removing and charging device in any given predetermined plane of the magazine regardless of dimensional tolerances. An optoelectronic sensor having a transmitter and receiver emits a bundle of measurement rays to detect the position of the wafer-shaped objects as well as the position of the magazine compartments relative to a reference plane whose location is rigidly defined by design with respect to a first handling plane for removing and charging. The magazine is adjustable vertically in a measurable manner for removal and charging by a magazine seat via a magazine lift. The device is applicable in the manufacture of integrated circuits, in particular for handling wafer-shaped objects.