Berndt Lahne
5Patents
4h-index
15Co-inventors
46Inventor score
Filing activity: Nov 3, 1994 → Oct 23, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5655869A | Device for coupling loading and unloading devices with semiconductor processing machines | Emerging Cross-Sectional Technologies | 42 | Expired |
| US5605428A | Device for indexing magazine compartments and wafer-shaped objects in the compartments | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5642978A | Device for handling disk-shaped objects in a handling plane of a local clean room | Emerging Cross-Sectional Technologies | 20 | Expired |
| US5807062A | Arrangement for handling wafer-shaped objects | Emerging Cross-Sectional Technologies | 20 | Expired |
| US7109509B2 | Device for the detection of substrates stacked with a specific spacing | Emerging Cross-Sectional Technologies | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.