Inventor · Jena, DE

Berndt Lahne

5Patents
4h-index
15Co-inventors
46Inventor score

Filing activity: Nov 3, 1994 → Oct 23, 2003

Most-cited inventions

PatentTitleAreaCited byStatus
US5655869A Device for coupling loading and unloading devices with semiconductor processing machines Emerging Cross-Sectional Technologies 42 Expired
US5605428A Device for indexing magazine compartments and wafer-shaped objects in the compartments Emerging Cross-Sectional Technologies 27 Expired
US5642978A Device for handling disk-shaped objects in a handling plane of a local clean room Emerging Cross-Sectional Technologies 20 Expired
US5807062A Arrangement for handling wafer-shaped objects Emerging Cross-Sectional Technologies 20 Expired
US7109509B2 Device for the detection of substrates stacked with a specific spacing Emerging Cross-Sectional Technologies 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.