Copolymers

US5616667A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Recai Sezi · Simmerath, DE
• Horst Borndoerfer · Erlangen, DE
• Hellmut Ahne · Königsee, DE
• Siegfried Birkle · Höchstadt an der Aisch, DE
• Eberhard Kuehn · Hemhofen, DE
• Rainer Leuschner · Regensburg, DE
• Eva Rissel · Forchheim, DE
• Michael Sebald · Waischenfeld, DE

Key dates

• Filing date: May 4, 1995
• Grant date: Apr 1, 1997
• Expiry date: May 4, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/039
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

New mixed polymers which can serve as base polymers for high-resolution resists are structured from 40 to 99 mole % of a tert. butyl ester of an unsaturated carboxylic acid and 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid.