Inventor · Königsee, DE

Hellmut Ahne

61Patents
15h-index
29Co-inventors
80Inventor score

Filing activity: May 9, 1980 → Dec 10, 1997

Most-cited inventions

PatentTitleAreaCited byStatus
US5234793A Method for dimensionally accurate structure transfer in bilayer technique wherein a treating step with a bulging agent is employed after development Physics 86 Expired
US4339521A Heat resistant positive resists containing polyoxazoles Physics 74 Expired
US5173393A Etch-resistant deep ultraviolet resist process having an aromatic treating step after development Physics 64 Expired
US4395482A Method for the preparation of heat-resistant relief structures using positive resists Physics 48 Expired
US5250375A Photostructuring process Physics 39 Expired
US5376499A Highly heat-resistant positive resists comprising end-capped hydroxypolyamides Emerging Cross-Sectional Technologies 34 Expired
US4849051A Heat resistant positive resists and method for preparing heat-resistant relief structures Emerging Cross-Sectional Technologies 34 Expired
US4622285A Method for manufacturing polyoxazole and polythiazole precursors Electricity 33 Expired
US5234794A Photostructuring method Physics 28 Expired
US4311785A Method for the preparation of highly heat-resistant relief structures and the use thereof Emerging Cross-Sectional Technologies 23 Expired
US4287294A Method for the preparation of relief structures by phototechniques Emerging Cross-Sectional Technologies 23 Expired
US4371685A Radiation-reactive precursor stages of highly heat-resistant polymers Physics 20 Expired
US5556812A Connection and build-up technique for multichip modules Electricity 19 Expired
US5081000A Photosensitive mixture Emerging Cross-Sectional Technologies 18 Expired
US4965134A Method for manufacturing highly heat-resistant dielectrics Emerging Cross-Sectional Technologies 17 Expired
US4385165A Polyimide, polyisoindoloquinazoline dione, polyoxazine dione and polyquinazoline dione precursor stages and the manufacture Chemistry; Metallurgy 15 Expired
US5384220A Production of photolithographic structures Emerging Cross-Sectional Technologies 13 Expired
US4329556A N-Azidosulfonylaryl-maleinimides Chemistry; Metallurgy 13 Expired
US4654415A Method for the preparation of polyimide and polyisoindoloquinazoline dione precursors Chemistry; Metallurgy 12 Expired
US4590103A Method for the preparation of thin polyimide film Chemistry; Metallurgy 12 Expired
US5973202A Preparation of poly-o-hydroxyamides and poly o-mercaptoamides Physics 10 Expired
US4883730A Method for manufacturing heat-stable structured layers based on expoxy resin Emerging Cross-Sectional Technologies 10 Expired
US4975347A Method for manufacturing heat-stable structured layers from photopolymers which are addition reaction products of olefinic unsaturated monoisocyanates and phenol-formaldehyde resins Emerging Cross-Sectional Technologies 10 Expired
US6110637A Photoresists which are suitable for producing sub-micron size structures Emerging Cross-Sectional Technologies 10 Expired
US5922825A Preparation of poly-o-hydroxyamides and poly o-mercaptoamides Physics 9 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.