Processing apparatus
US5618350A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 21, 1996 |
| Grant date | Apr 8, 1997 |
| Priority date | — |
| Expiry date | Mar 21, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A receptacle terminal is provided at a mount table and comprised of a downwardly opened electroconductive cap member. The receptacle terminal is connected to a heating element of a heater. A plug terminal is forced into the receptacle terminal and has an electroconductive section, support section and insulating pipe. The insulating pipe is provided around the circumference of the support section. A first clearance is defined between the support section and the inner wall of the insulating pipe. A second clearance is defined between the end face of the electroconductor section and that of the insulating pipe. The lower end portions of the support section and insulating pipe extend out of a processing chamber via a hole in the bottom plate of the processing chamber. A gas supply attachment is provided around the circumference of the insulating pipe and has a cavity including the circumferential portion of the insulating pipe and communicating with a gas supply pipe. The cavity communicates with the first clearance via a hole partially provided in the insulating pipe at the cavity. The gas supply pipe communicating with the cavity is connected to an inert gas supply source. The inert …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.