Acceleration sensor

US5627317A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Michael Offenberg · Lörrach, DE
• Wolfgang Buchholtz · Radebeul, DE
• Markus Lutz · Palo Alto, US

Key dates

• Filing date: Jun 6, 1995
• Grant date: May 6, 1997
• Expiry date: Jun 6, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P15/125
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor in which the structure of a movable element is produced from an upper silicon layer of a laminated substrate. Individual regions of the upper layer are insulated from one another by insulation trenches which are bridged by conductor tracks coupled to at least one electrode on the movable element and at least one stationary electrode on the upper layer proximate to the at least one electrode on the movable element.