Patent · US Expired

Sensor comprising multilayer substrate

US5631422A · kind A · utility

41Cited by

4References

10Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Peter Sulzberger · Treuchtlingen, DE
Michael Offenberg · Lörrach, DE
Bernhard Elsner · Bad Berka, DE
Markus Lutz · Palo Alto, US

Key dates

Filing date	Oct 30, 1995
Grant date	May 20, 1997
Priority date	—
Expiry date	Oct 30, 2015

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor includes a first silicon layer, and a sensor element including at least one electrode structured from the first silicon layer. The sensor also includes at least one connecting element also structured from the first silicon layer. The connecting element has a doping less than the doping of the electrode. The sensor comprises at least one conductor track on the first silicon layer routed over the connecting element and coupled to the sensor element for supplying an external signal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.