Method and apparatus for aerial image analyzer
US5631731A · kind A · utility
41Cited by
17References
38Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 9, 1994 |
| Grant date | May 20, 1997 |
| Priority date | — |
| Expiry date | Mar 9, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/706
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus to analyze the aerial image of an optical system using a subwavelength slit. A slit configuration yields a higher signal-to-noise ratio than that achievable with a round aperture. The slit also allows the polarization of the aerial image to be analyzed. In an alternative embodiment a tunneling slit is used. The tunneling slit comprises an optically transparent ridge-like structure mounted to a substrate, the combined structure covered by a thin, planar metal film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.