Concentric rings with different RF energies applied thereto
US5637961A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 1995 |
| Grant date | Jun 10, 1997 |
| Priority date | — |
| Expiry date | Aug 21, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32165
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma generating apparatus comprises a chamber for containing an object to be treated, a pair of high frequency coils located concentric in the chamber and opposed to the object, to generate alternating magnetic fields for inducing alternating electric fields in the chamber, the alternating electric fields creating plasma used to treat the object, a high frequency power supply for generating a high frequency power, distribution means for distributing the high frequency power into a plurality of distributed powers at a predetermined distribution ratio, phase shifter means for shifting the phase of each of the distributed powers, and a matching box for supplying the high frequency coils with the distributed powers of phases set by the phase shifter means, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.