Inventor · Yamanashi, JP

Nobuo Ishii

67Patents
21h-index
43Co-inventors
88Inventor score

Filing activity: May 27, 1987 → Dec 3, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US5698036A Plasma processing apparatus Electricity 414 Expired
US6433298B1 Plasma processing apparatus Electricity 378 Expired
US6528752B1 Plasma processing apparatus and plasma processing method Electricity 363 Expired
US5571366A Plasma processing apparatus Electricity 284 Expired
US7243610B2 Plasma device and plasma generating method Electricity 224 Expired
US5529657A Plasma processing apparatus Emerging Cross-Sectional Technologies 200 Expired
US5342472A Plasma processing apparatus Electricity 88 Expired
US5851298A Susceptor structure for mounting processing object thereon Chemistry; Metallurgy 81 Expired
US5314541A Reduced pressure processing system and reduced pressure processing method Electricity 79 Expired
US5683537A Plasma processing apparatus Electricity 65 Expired
US5685942A Plasma processing apparatus and method Electricity 52 Expired
US5795429A Plasma processing apparatus Electricity 50 Expired
US5637961A Concentric rings with different RF energies applied thereto Electricity 44 Expired
US5874706A Microwave plasma processing apparatus using a hybrid microwave having two different modes of oscillation or branched microwaves forming a concentric electric field Electricity 38 Expired
US6347602B2 Plasma processing apparatus Electricity 35 Expired
US5374327A Plasma processing method Physics 31 Expired
US5783492A Plasma processing method, plasma processing apparatus, and plasma generating apparatus Chemistry; Metallurgy 31 Expired
US6311638A Plasma processing method and apparatus Electricity 30 Expired
US5455082A Reduced pressure processing system and reduced pressure processing method Electricity 29 Expired
US4749912A Ion-producing apparatus Electricity 25 Expired
US5173641A Plasma generating apparatus Electricity 22 Expired
US7632379B2 Plasma source and plasma processing apparatus Electricity 17 Expired
US5701228A Stage system or device Electricity 16 Expired
US6622650B2 Plasma processing apparatus Electricity 15 Expired
US6066568A Plasma treatment method and system Electricity 11 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.