Nobuo Ishii
67Patents
21h-index
43Co-inventors
88Inventor score
Filing activity: May 27, 1987 → Dec 3, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5698036A | Plasma processing apparatus | Electricity | 414 | Expired |
| US6433298B1 | Plasma processing apparatus | Electricity | 378 | Expired |
| US6528752B1 | Plasma processing apparatus and plasma processing method | Electricity | 363 | Expired |
| US5571366A | Plasma processing apparatus | Electricity | 284 | Expired |
| US7243610B2 | Plasma device and plasma generating method | Electricity | 224 | Expired |
| US5529657A | Plasma processing apparatus | Emerging Cross-Sectional Technologies | 200 | Expired |
| US5342472A | Plasma processing apparatus | Electricity | 88 | Expired |
| US5851298A | Susceptor structure for mounting processing object thereon | Chemistry; Metallurgy | 81 | Expired |
| US5314541A | Reduced pressure processing system and reduced pressure processing method | Electricity | 79 | Expired |
| US5683537A | Plasma processing apparatus | Electricity | 65 | Expired |
| US5685942A | Plasma processing apparatus and method | Electricity | 52 | Expired |
| US5795429A | Plasma processing apparatus | Electricity | 50 | Expired |
| US5637961A | Concentric rings with different RF energies applied thereto | Electricity | 44 | Expired |
| US5874706A | Microwave plasma processing apparatus using a hybrid microwave having two different modes of oscillation or branched microwaves forming a concentric electric field | Electricity | 38 | Expired |
| US6347602B2 | Plasma processing apparatus | Electricity | 35 | Expired |
| US5374327A | Plasma processing method | Physics | 31 | Expired |
| US5783492A | Plasma processing method, plasma processing apparatus, and plasma generating apparatus | Chemistry; Metallurgy | 31 | Expired |
| US6311638A | Plasma processing method and apparatus | Electricity | 30 | Expired |
| US5455082A | Reduced pressure processing system and reduced pressure processing method | Electricity | 29 | Expired |
| US4749912A | Ion-producing apparatus | Electricity | 25 | Expired |
| US5173641A | Plasma generating apparatus | Electricity | 22 | Expired |
| US7632379B2 | Plasma source and plasma processing apparatus | Electricity | 17 | Expired |
| US5701228A | Stage system or device | Electricity | 16 | Expired |
| US6622650B2 | Plasma processing apparatus | Electricity | 15 | Expired |
| US6066568A | Plasma treatment method and system | Electricity | 11 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.