Probe apparatus having probe card exchanging mechanism
US5640100A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Oct 20, 1995 |
| Grant date | Jun 17, 1997 |
| Priority date | — |
| Expiry date | Oct 20, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06705
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe apparatus for examining an electrical characteristic of IC chips formed on a semiconductor wafer has a work table provided in a casing and a probe card provided above the work table. The probe card is detachably attached to an insert ring supported by the casing. A card exchanging mechanism for automatically attaching and detaching the probe card to and from the insert ring is provided. The card exchanging mechanism has a tray for mounting the probe card and transferring the-probe card. The tray is changeable at an initial position outside the casing between a usable state where the tray is horizontally expanded and an unusable state where the tray is vertically folded. An opening/closing cover is provided to cover the tray in the unusable state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.