Magnetic levitation conveyor apparatus
US5641054A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 1995 |
| Grant date | Jun 24, 1997 |
| Priority date | — |
| Expiry date | Mar 7, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67736
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.