Norio Kimura
161Patents
27h-index
208Co-inventors
93Inventor score
Filing activity: May 29, 1986 → May 21, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5641054A | Magnetic levitation conveyor apparatus | Electricity | 119 | Expired |
| US5762539A | Apparatus for and method for polishing workpiece | Performing Operations; Transporting | 116 | Expired |
| US5476414A | Polishing apparatus | Performing Operations; Transporting | 98 | Expired |
| US5639388A | Polishing endpoint detection method | Performing Operations; Transporting | 82 | Expired |
| US5616063A | Polishing apparatus | Electricity | 79 | Expired |
| US5384986A | Polishing apparatus | Performing Operations; Transporting | 76 | Expired |
| US6632335B2 | Plating apparatus | Electricity | 74 | Expired |
| US5716264A | Polishing apparatus | Performing Operations; Transporting | 73 | Expired |
| US5398459A | Method and apparatus for polishing a workpiece | Performing Operations; Transporting | 63 | Expired |
| US5651724A | Method and apparatus for polishing workpiece | Performing Operations; Transporting | 54 | Expired |
| US6558229B2 | Polishing apparatus | Electricity | 53 | Expired |
| US5018186A | Communicating apparatus providing discriminated voice and/or image communication | Emerging Cross-Sectional Technologies | 46 | Expired |
| US5679063A | Polishing apparatus | Performing Operations; Transporting | 41 | Expired |
| US5839947A | Polishing apparatus | Performing Operations; Transporting | 39 | Expired |
| US6663469B2 | Polishing method and apparatus | Electricity | 38 | Expired |
| US6294059A | Substrate plating apparatus | Emerging Cross-Sectional Technologies | 36 | Expired |
| US6558239B2 | Polishing apparatus | Performing Operations; Transporting | 35 | Expired |
| US6939208B2 | Polishing apparatus | Electricity | 35 | Expired |
| US6077385A | Polishing apparatus | Performing Operations; Transporting | 34 | Expired |
| US6019868A | Polishing apparatus | Performing Operations; Transporting | 34 | Expired |
| US5670011A | Apparatus and method for polishing workpiece | Performing Operations; Transporting | 33 | Expired |
| US5916412A | Apparatus for and method of polishing workpiece | Performing Operations; Transporting | 32 | Expired |
| US5830041A | Method and apparatus for determining endpoint during a polishing process | Performing Operations; Transporting | 31 | Expired |
| US6354907B1 | Polishing apparatus including attitude controller for turntable and/or wafer carrier | Performing Operations; Transporting | 31 | Expired |
| US5857898A | Method of and apparatus for dressing polishing cloth | Performing Operations; Transporting | 30 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.