Device for handling disk-shaped objects in a handling plane of a local clean room

US5642978A · kind A · utility

Assignee

• JENOPTIK GmbH · DE

Inventors

• Berndt Lahne · Jena, DE
• Klaus Schultz · Jena, DE
• Werner Scheler · Jena, DE
• Michael Heitmann · Kamen, DE
• Axel Gaglin · Jena, DE

Key dates

• Filing date: Jun 3, 1996
• Grant date: Jul 1, 1997
• Expiry date: Jun 3, 2016

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/137
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A device for handling disk-shaped objects in a handling plane of a local clean room has the object of ensuring process steps preceding or following the processing and inspection of the disk-shaped objects under the conditions of a local clean room with the use of SMIF boxes. The handling plane (H--H) is in a fixed constructional relationship with a reference plane (E--E) of at least one device comprising the magazine seat as a component part, which device serves to index the shelves of magazines and disk-shaped objects contained therein and is arranged above an intermediate base dividing the clean room into two partial spaces located one above the other, in which an air flow component of an air flow is directed from the partial space above the intermediate base into the partial space below the intermediate base. The device can be used in the manufacture of integrated circuits, particularly for handling tasks.