Inventor · Jena, DE

Werner Scheler

12Patents
9h-index
23Co-inventors
68Inventor score

Filing activity: Jul 16, 1984 → Jun 12, 2003

Most-cited inventions

PatentTitleAreaCited byStatus
US6000732A Arrangement for locking and unlocking a door of a container Emerging Cross-Sectional Technologies 412 Expired
US5772386A Loading and unloading station for semiconductor processing installations Emerging Cross-Sectional Technologies 111 Expired
US5655869A Device for coupling loading and unloading devices with semiconductor processing machines Emerging Cross-Sectional Technologies 42 Expired
US6071059A Loading and unloading station for semiconductor processing installations Emerging Cross-Sectional Technologies 37 Expired
US6375403B1 Loading and unloading station for semiconductor processing installations Emerging Cross-Sectional Technologies 24 Expired
US5642978A Device for handling disk-shaped objects in a handling plane of a local clean room Emerging Cross-Sectional Technologies 20 Expired
US6609876B2 Loading and unloading station for semiconductor processing installations Emerging Cross-Sectional Technologies 19 Expired
US6837663B2 Loading and unloading station for semiconductor processing installations Emerging Cross-Sectional Technologies 17 Expired
US4583847A Mounting table for wafers Electricity 12 Expired
US6461094B1 Loading and unloading station for semiconductor processing installations Emerging Cross-Sectional Technologies 7 Expired
US5715929A Charging device for semiconductor processing installations Emerging Cross-Sectional Technologies 6 Expired
US5636724A Device for transferring a transport object between two end positions Emerging Cross-Sectional Technologies 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.