Quinone diazo compound containing non-metallic atom
US5644038A · kind A · utility
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14References
11Claims
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Assignee
Inventors
Key dates
| Filing date | Mar 15, 1996 |
| Grant date | Jul 1, 1997 |
| Priority date | — |
| Expiry date | Mar 15, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/168
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Quinone diazo compounds having bonded to the diazo ring or directly bonded to a ring of the compound, certain non-metallic atoms that improve the photosensitivity thereof are provided. These quinone diazo compounds are useful as photoactive compounds in photoresist compositions, and particularly positive photoresist composition employed in x-ray or electron beam radiation. Also provided is a method for preparing compounds of the present invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.